ACKNOWLEDGEMENTS ............................................. viii
Introduction .................................................... 1
MEMS and microfluidics ...................................... 1
The birth of microfluidics .................................. 8
Microfluidics and lab-on-a-chip devices .................... 11
Microfluidics and chemical engineering ..................... 13
Astonishing microfluidic systems in nature ................. 15
Different aspects of microfluidics ......................... 16
Possibilities offered by nanofluidics ...................... 18
Specialized publications ................................... 18
Organization of the text ................................... 19
Perspectives on microfluidics .............................. 21
References ................................................. 21
1. Physics at the micrometric scale ........................... 24
1.1. Introduction ......................................... 24
1.2. Ranges of forces of microscopic origin ............... 26
1.3. Microscopic scales intervening in liquids and
gases ................................................ 36
1.4. Micromanipulation of molecules and cells in
microsystems ......................................... 38
1.5. The physics of miniaturization ....................... 45
1.6. Miniaturization of electrostatic systems ............. 54
1.7. Miniaturization of electromagnetic systems ........... 59
1.8. Miniaturization of mechanical systems ................ 62
1.9. Miniaturization of thermal systems ................... 65
1.10. Miniaturization of systems for chemical analysis ..... 67
References ........................................... 69
2. Hydrodynamics of microfluidic systems ...................... 70
2.1. Introduction ......................................... 70
2.2. Hypotheses of hydrodynamics .......................... 71
2.3. Hydrodynamics of gases in microsystems ............... 81
2.4. Flow of liquids with slip at the surface ............. 86
2.5. Microhydrodynamics ................................... 90
2.6. Microfluidics involving inertial effects ............ 101
2.7. Interface phenomena: a few ideas about
capillarity ......................................... 105
2.8. Microfluidics of drops and bubbles .................. 120
2.9. Diphasic flows, emulsions in microsystems ........... 122
References ................................................ 127
3. Diffusion, mixing, and separation in microsystems ......... 130
3.1. Introduction ........................................ 130
3.2. The microscopic origin of diffusion processes ....... 131
3.3. Advection-diffusion equation and its properties ..... 136
3.4. Analysis of some diffusion phenomena ................ 141
3.5. Analysis of dispersion phenomena .................... 144
3.6. Notions on chaos and chaotic mixing ................. 148
3.7. Mixing in microsystems: a few examples .............. 152
3.8. Adsorption phenomena ................................ 160
3.9. Dispersion with chemical kinetics ................... 166
3.10. Chromatography ...................................... 175
References ................................................ 187
4. The electrohydrodynamics of microsystems .................. 189
4.1. Introduction ........................................ 189
4.2. Brief review of electrokinetics ..................... 191
4.3. Electro-osmosis ..................................... 197
4.4. Electrophoresis ..................................... 200
4.5. Dielectrophoresis ................................... 211
References ................................................ 214
5. Microfluidics and thermal transfers ....................... 216
5.1. Introduction ........................................ 216
5.2. Conduction of heat in gases, liquids, and solids .... 217
5.3. Gas flows at moderate Knudsen numbers ............... 220
5.4. Convection-diffusion heat equation and
properties .......................................... 221
5.5. Thermalization of a heat source in a microsystem .... 227
5.6. Heat transfers in the presence of flows in
microsystems ........................................ 229
5.7. Evaporation and boiling ............................. 234
5.8. Microexchangers for electronic components ........... 239
5.9. Conclusion .......................................... 242
References ................................................ 242
6. An introduction to microfabrication ....................... 244
6.1. Introduction ........................................ 244
6.2. Current situation of microtechnologies .............. 244
6.3. The environment of microfabrication ................. 248
6.4. Photolithography .................................... 248
6.5. Microfabrication methods for silicon and glass
MEMS ................................................ 254
6.6. Methods of fabrication of plastic MEMS .............. 273
References ................................................ 280
7. Some microfluidic devices ................................. 282
7.1. Introduction ........................................ 282
7.2. Examples of microfluidic structures ................. 282
7.3. A ubiquitous microplumbing problem: connections ..... 288
7.4. Examples of microfabricated valves and pumps ........ 290
References ................................................ 295
CONCLUSION .................................................... 296
INDEX ......................................................... 299
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