Chapter 1
Image Processing and Computer Vision for MEMS Testing ........... 1
Markus Hüttel
Chapter 2
Image Correlation Techniques for Microsystems Inspection ....... 55
Dietmar Vogel and Bernd Michel
Chapter 3
Light Scattering Techniques for the Inspection of
Microcomponents and Microstructures ........................... 103
Angela Duparré
Chapter 4
Characterization and Measurement of Microcomponents with
the Atomic Force Microscope (AFM) ............................. 121
F. Michael Serry and Joanna Schmit
Chapter 5
Optical Profiling Techniques for MEMS Measurement ............. 145
Klaus Körner, Aiko Ruprecht, and Tobias Wiesendanger
Chapter 6
Grid and Moiré Methods for Micromeasurements .................. 163
Anand Asundi, Bing Zhao, and Huimin Xie
Chapter 7
Grating Interferometry for In-Plane Displacement and Strain
Measurement of Microcomponents ................................ 201
Leszek Salbut
Chapter 8
Interference Microscopy Techniques for Microsystem
Characterization .............................................. 217
Alain Bosseboeuf and Sylvain Petitgrand
Chapter 9
Measuring MEMS in Motion by Laser Doppler Vibrometry .......... 245
Christian Rembe, Georg Siegmund, Heinrich Steger, and
Michael Wörtge
Chapter 10
An Interferometric Platform for Static, Quasi-Static, and
Dynamic Evaluation of Out-of-Plane Deformations of MEMS and
MOEMS ......................................................... 293
Christophe Gorecki, Michal Jozwik, and Patrick Delobelle
Chapter 11
Optoelectronic Holography for Testing Electronic Packaging
and MEMS ...................................................... 325
Cosme Furlong
Chapter 12
Digital Holography and Its Application in MEMS/MOEMS
Inspection .................................................... 351
Wolfgang Osten and Pietro Ferraro
Chapter 13
Speckle Metrology for Microsystem Inspection .................. 427
Roland Hofiing and Petra Aswendt
Chapter 14
Spectroscopic Techniques for MEMS Inspection .................. 459
Ingrid De Wolf
Index ......................................................... 483
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