Поступления иностранных книг в библиотеки ННЦ в 2003 г.
Институт физики полупроводников |  |
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Contamination-free manufacturing for semiconductors and other precision products / Ed. by Donovan R.P. - New York: DekkerBasel, 2001. - IX,448 p.: ill. - (ISBN 0-8247-0380-4) - Чистые технологии производства полупроводников и других точных изделий.
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- This reference provides advanced treatment on the origins, procedures, and disposal of a variety of contaminants and summarizes the latest control practices in the semiconductor chip manufacturing industry. It describes contamination problems and outlines target control levels, then examines detection and measurement of contamination, transport and deposition, removal, and contamination prevention. Techniques can be applied to other industries. Specific topics include transport and deposition of aerosol particles, on-wafer measurement of particles and molecular contaminants, and deposition of metallic contaminants from liquids and their removal. Much of the material grew out of an April 1995 short course sponsored by the University of California Extension. Donovan is a process engineer in the private sector.
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