List of table ................................................... 1
List of Figures .................................................
1 Introduction ................................................. 1
1.1 Motivation .............................................. 1
1.2 Goal and structure of thesis ............................ 4
2 Technical Status of Nano Biosensor ........................... 5
2.1 Principle of Nano Biosensor ............................. 5
2.2 Type of Nano Biosensor .................................. 6
2.2.1 Optical detection ................................ 6
2.2.2 Mechanical detection ............................ 16
2.2.3 Electrical detection ............................ 24
2.3 Comparison of Nano Biosensors .......................... 28
2.4 Technical Trend for Nano Biosensor ..................... 31
2.5 Vision for Nano Biosensor Applications ................. 33
2.5.1 Acceleration and hindrance factor of market
growth .......................................... 33
2.5.2 Trend and Vision for Nano Biosensor Markets ..... 35
3 Technologies for Nanowire Sensor ............................ 38
3.1 Principle .............................................. 38
3.1.1 Metal Oxide Semiconductor Field Effect
Transistor(MOSFET) .............................. 38
3.1.2 Biologically-Sensitive Field Effect Transistor
(BioFET) ........................................ 47
3.1.3 Nanowire Field Effect Transistor (NW-FET) ....... 56
3.1.4 Schottky Barrier Nanowire Field Effect
Transistor (SBNW-FET) ........................... 58
3.2 Nanowire sensor ........................................ 65
3.2.1 Silicon nanowire FET Biosensor-Type A ........... 65
3.2.2 Silicon nanowire FET Biosensor-Type В ........... 88
3.2.3 Silicon Nanoribbon FET Biosensor ................ 97
4 Technologies for system integration ........................ 110
4.1 Materials and Technologies for System integration ..... 110
4.1.1 Packaging of biomedical electronic devices ..... 113
4.1.2 Materials for packaging biomedical electronic
systems ........................................ 114
4.2 R Electrical interconnections ......................... 119
4.2.1 Schematic design of the packaged product ....... 119
4.2.2 Interconnection layout design .................. 121
4.3 Wet solution sealing .................................. 123
4.4 Measuring system ...................................... 125
5 Conclusion ................................................. 127
Reference ..................................................... 129
List of Tables
[Chapter 2]
Table 2-1
[Chapter 3]
Table 3-1 ................................................... 55
Table 3-2 .................................................. 101
Table 3-3 .................................................. 104
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