Preface ........................................................ ix
About the Authors .............................................. xi
Acknowledgments .............................................. xiii
Nomenclature List .............................................. xv
CHAPTER 1 Introduction ......................................... l
1.1 Length scales .............................................. 1
1.2 Scope and layout of the book ............................... 6
1.3 Future outlook ............................................. 7
References ................................................. 8
Select bibliography ........................................ 8
CHAPTER 2 Fundamentals for Microscale and Nanoscale Flows ...... 9
2.1 Introduction ............................................... 9
2.2 Definition of a fluid ..................................... 10
2.3 Pressure-driven flows ..................................... 10
2.4 Low Reynolds number flows ................................. 13
2.5 Electrokinetic phenomena .................................. 16
2.6 The electric double layer ................................. 17
2.7 Debye length .............................................. 20
2.8 Electrokinetic phenomena: revisited ....................... 26
2.9 Coupling species transport and fluid mechanics ............ 30
2.10 Numerical simulations and advanced modeling methods ....... 31
Exercises ................................................. 34
References ................................................ 35
Select bibliography ....................................... 35
CHAPTER 3 Interfaces in Microfluidic and Nanofluidic Systems .. 39
3.1 Introduction .............................................. 39
3.2 Introduction to surfaces .................................. 40
3.3 Surface charge ............................................ 41
3.4 Surface energy ............................................ 43
3.5 Thermodynamics of surfaces ................................ 45
3.5.1 Formation of surface layers ........................ 46
3.5.2 Surface modification methods ....................... 55
3.6 Surface characterization methods with relevance to
microfluidics and nanofluidics ............................ 60
3.6.1 Indirect methods ................................... 60
3.6.2 Direct methods ..................................... 67
3.7 Surface tension-driven flows .............................. 73
3.8 Device interfaces ......................................... 75
References ................................................. 77
Select bibliography ........................................ 78
CHAPTER 4 Advanced Fabrication Methods and Techniques ......... 87
4.1 Introduction to micro- and nanofabrication ................ 88
4.1.1 Patterning—photolithography ........................ 88
4.1.2 Additive techniques ............................... 100
4.1.3 Subtractive techniques ............................ 112
4.1.4 Lift-off .......................................... 123
4.1.5 Bonding ........................................... 124
4.2 Advanced patterning techniques ........................... 130
4.2.1 Remarks on nanoscale patterning ................... 130
4.2.2 Electron beam lithography ......................... 132
4.2.3 Focused ion-beam lithography ...................... 133
4.2.4 Nanoimprint lithography ........................... 134
4.2.5 Soft lithography .................................. 136
4.2.6 Self-assembly and self-organization ............... 142
4.2.7 Other emerging techniques ......................... 148
4.3 Materials in micro- and nanofluidics ..................... 150
4.3.1 Silicon ........................................... 151
4.3.2 Glass and quartz .................................. 154
4.3.3 Other ceramics .................................... 155
4.3.4 Polymers .......................................... 156
4.3.5 Nanomaterials ..................................... 157
4.4 Fabrication case study ................................... 157
4.4.1 Case 1. Fabrication of gas microvalve and
micropump ......................................... 157
4.4.2 Case 2. Fabrication of single nanopore ............ 159
References ............................................... 162
Select bibliography ...................................... 170
CHAPTER 5 Lab-on-a-Chip and Fluid Manipulation
Applications .................................................. 171
5.1 Introduction ............................................. 171
5.2 Fluid manipulation ....................................... 172
5.3 Microvalves and nanovalves ............................... 173
5.4 Micropumps and nanopumps ................................. 182
5.5 On-chip separations and combinations ..................... 186
5.5.1 Sample injection and separation .................... 187
5.6 Transport and analysis systems for DNA ................... 194
5.7 Biosensors ............................................... 197
5.8 Nanomedicine and nanobiotechnology ....................... 205
5.9 Instrumentation and platforms at the microscale and
nanoscale ................................................ 206
5.9.1 Micro-gas chromatography: a case study for
a lab-on-a-chip system ............................ 206
5.9.2 Micro-scale impedance measurements for flow
diagnostics at the nanoscale: a case study ........ 214
References ............................................... 219
Select bibliography ...................................... 230
CHAPTER 6 Energy and Environmental Applications .............. 241
6.1 Introduction ............................................. 241
6.2 Combustion-based devices ................................. 241
6.3 Microfuel cells .......................................... 244
6.3.1 Laminar flow-based fuel cells ..................... 246
6.3.2 Inorganic—organic hybrid proton exchange
membrane based on porous silicon .................. 248
6.3.3 Onboard hydrogen generators for microfuel cells ... 250
6.4 Electrokinetic energy conversion ......................... 252
6.5 Sensors for water contamination .......................... 254
6.6 Energy-efficient water purification ...................... 254
6.6.1 Microfluidic and nanofluidic concentration
polarization for desalination ..................... 257
6.6.2 Advanced membranes ................................ 258
6.6.3 Microbial desalination cells ...................... 259
6.7 Asymmetry-driven ion pumps ............................... 261
References ............................................... 261
Select bibliography ...................................... 264
Appendix A: Review of Mathematical Concepts ................... 271
Appendix B: Useful Tabulated Data ............................. 283
Index ......................................................... 287
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