Preface ........................................................ ix
List of Abbreviations (in Order of Appearance) ................. xi
List of Important Symbols (in Order of Appearance) ........... xiii
Introduction ................................................... xv
Part 1. BPSG Thin Film Deposition ............................... 1
Chapter 1 Brief Historical Overview of BPSG Thin Film
Research ............................................. 3
Chapter 2 Basic BPSG Film CVD Tools and Methodology ............ 9
Chapter 3 Basic BPSG CVD Kinetic Features ..................... 17
Chapter 4 As-Deposited BPSG Film Step Coverage and Gap-Fill ... 33
Chapter 5 Glass Film CVD Schemes .............................. 41
Chapter 6 BPSG Film Industrial CVD Technology ................. 47
Part 2. BPSG Film Composition, Structure, and Properties ....... 51
Chapter 7 Brief Review on BPSG Thin Film Analysis Techniques .. 53
Chapter 8 BPSG Film Composition ............................... 65
Chapter 9 BPSG Film Structure ................................. 71
Chapter 10 Basic BPSG Film Properties .......................... 79
Chapter 11 BPSG Film Flow Capability ........................... 95
Chapter 12 BPSG Film - Ambient Moisture Interaction ........... 101
Chapter 13 Defect Formation Phenomenon in BPSG Films .......... 121
Chapter 14 Interrelation of BPSG Film Deposition,
Composition, Structure, and Properties ............. 153
Part 3. BPSG Film Implementation in Electronics ............... 163
Chapter 15 Thermally Induced BPSG Film Viscous Flow on
Stepped 1С Device Structures ....................... 165
Chapter 16 BPSG Film Composition Optimization ................. 197
Chapter 17 BPSG Film Durability ............................... 201
Chapter 18 BPSG Films in Electronic Technologies .............. 207
Conclusion .................................................... 217
Acknowledgments ............................................... 219
References .................................................... 221
Author Biography .............................................. 235
Index ......................................................... 237
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