Preface ....................................................... vii
Acknowledgments ................................................ ix
Editors ........................................................ xi
Contributors ................................................. xiii
Chapter 1 Introduction ......................................... 1
Chapter 2 Nonthermal Plasma Chemical Processes of General
Interest ............................................. 7
Chapter 3 Physics of Nonthermal Plasmas ....................... 15
Chapter 4 Nonthermal Plasma Chemical Reactors ................ 137
Chapter 5 Elementary Processes on Surfaces in Plasma-Wall
Interaction ........................................ 163
Chapter 6 Plasma Diagnostics ................................. 187
Chapter 7 Surface and Thin Film Analysis ..................... 255
Chapter 8 Selected Applications .............................. 285
Chapter 9 Modeling and Simulation ............................ 407
Chapter 10 Trends and New Concepts ............................ 469
References .................................................... 473
Index ......................................................... 539
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