Preface ........................................................ ix
Materials Research Society Symposium Proceedings ............... xi
MATERIAL DEVELOPMENT AND OPTIMIZATION
Biodegradable Microfluidic Scaffolds with Tunable Degradation
Properties from Amino Alcohol-Based Poly (ester Amide)
Elastomers ...................................................... 3
Jane Wang, Tatiana Kniazeva, Carly F. Campbell, Robert
Langer, Jeffrey S. Ustin, and Jeffrey T. Borenstein
Measurements of Resonance Frequency of Parylene Microspring
Arrays Using Atomic Force Microscopy ............................ 9
C. Gaire, M. He, A. Zandiatashbar, P.-I. Wang, R.C. Picu,
G.-C. Wang, and T.-M. Lu
Gold in Flux-less Bonding: Noble or Not Noble .................. 15
Marco Balucani, Paolo Nenzi, Fabrizio Palma, Hanna
Bandarenka, Leonid Dolgyi, and Aliksandr Shapel
Giant Piezoresistive Variation of Metal Particles Dispersed
in PDMS Matrix ................................................. 21
Stefano Stassi, Giancarlo Canavese, Mariangela Lombardi,
Andrea Guerriero, and Candido Fabrizio Pirri
Characterization of Group Ill-Nitride Based Surface Acoustic
Wave Devices for High Temperature Applications ................. 29
J. Justice, L.E. Rodak, V. Narang, K. Lee, L.A. Hornak,
and D. Korakakis
Transport Model for Microfluidic Device for Cell Culture
and Tissue Development ......................................... 35
Niraj Inamdar, Linda Griffith, and Jeffrey T. Borenstein
Refractive Index Memory Effect of Ferroelectric Materials
by Domain Control .............................................. 41
Kazuhiko Inoue and Takeshi Morita
Synthesis and Control of ZnS Nanodots and Nanorods with
Different Crystalline Structure from an Identical Raw
Material Solution and the Excitonic UV Emission ................ 47
Masato Uehara, Satoshi Sasaki, Yusuke Nakamura, Changi Lee,
Hiroyuki Nakamura, and Hideaki Maeda
Improving PZT Thin Film Texture through Pt Metallization
and Seed Layers ................................................ 53
L.M. Sanchez, D.M. Potrepka, G.R. Fox, I. Takeuchi, and
R.G. Polcawich
PROCESS INTEGRATION
Patterning Nanomaterials on Fragile Micromachined Structures
Using Electron Beam Lithography ................................ 61
Kaushik Das, Pascal Hubert, and Srikar Vengallatore
Pt/TiO2 Growth Templates for Enhanced PZT Films and MEMS
Devices ........................................................ 67
Daniel M. Potrepka, Glen R. Fox, Luz M. Sanchez, and
Ronald G. Polcawich
Contact Resistivity of Laser Annealed SiGe for MEMS
Structural Layers Deposited at 210°C ........................... 73
Joumana El-Rifai, Ann Witvrouw, Ahmed Abdel Aziz, Robert
Puers, Chris Van Hoof, and Sherif Sedky
PZT Thick Films for 100 MHz Ultrasonic Transducers Fabricated
Using Chemical Solution Deposition Process ..................... 79
Naoto Kochi, Takashi Iijima, Takashi Nakajima, and
Soichiro Okamura
Reliability and Stability of Thin-Film Amorphous Silicon MEMS
on Glass Substrates ............................................ 85
P.M. Sousa, V. Chu, and J.P. Conde
High Yield Polymer MEMS Process for CMOS/MEMS Integration ...... 91
Prasenjit Ray, V. Seena, Prakash R. Apte, and Ramgopal Rao
Characterization of Textured PZT Thin Films Prepared
by Sol-Gel Method onto Stainless Steel Substrates .............. 97
Xuelian Zhao, Xufang Yu, Shengwen Yu, and Jinrong Cheng
MICRO- AND NANOSENSORS
A Picowatt Energy Harvester ................................... 105
Joe Evans, Johannes Smits, Carl Montross, and Gerald
Salazar
Mechanical and Material Characterization of Bilayer
Microcantilever-Based IR detectors ............................ 111
I-Kuan Lin, Ping Du, Yanhang Zhang, and Xin Zhang
Film Conductivity Controlled Variation of the Amplitude
Distribution of High-Temperature Resonators ................... 117
Silja Schmidtchen, Denny Richter, Han Xia, and Holger
Fritze
Ultrafine Silicon Nano-Wall Hollow Needles and Applications
in Inclination Sensor and Gas Transport ....................... 123
Z. Sanaee, S. Mohajerzadeh, M. Mehran, and M. Araghchini
Development of a Robust Design of a Wet Etched Co-Integrated
Pressure Sensor ............................................... 129
Wolfgang Schreiber-Prillwitz, Mikko Saukoski, Gerhard
Chmiel, and Reinhart Job
SU8 / Modified MWNT Composite for Piezoresistive Sensor
Application ................................................... 135
Prasenjit Ray, V. Seena, Rupesh A. Khare, Amp R.
Bhattacharyya, Prakash R. Apte, and Ramgopal Rao
Thin Film Amorphous Silicon Bulk-Mode Disk Resonators
Fabricated on Glass Substrates ................................ 141
A. Gualdino, V. Chu, and J.P. Conde
Fabrication and Characterization of MEMS-Based Structures
from a Bio-Inspired, Chemo-Responsive Polymer Nanocomposite ... 147
Allison E. Hess and Christian A. Zorman
MATERIAL AND DEVICE RELIABILITY
Characterizing the Effect of Uniaxial Strain on the Surface
Roughness of Si Nanowire MEMS-Based Microstructures ........... 155
E. Escobedo-Cousin, S.H. Olsen, T. Pardoen, U. Bhaskar,
and J.-P. Raskin
Mechanism of Hole Inlet Closure in Shape Transformation
of Hole Arrays on Si(001) Substrates by Hydrogen Annealing .... 161
Reiko Hiruta, Hitoshi Kuribayashi, Koichi Sudoh, and
Ryosuke Shimizu
Characterization of Hydrophobic Forces for in Liquid
Self-Assembly of Micron-Sized Functional Building Blocks ...... 167
M.R. Gullo, L. Jacot-Descombes, L. Aeschimann, and
J. Brugger
Nanoindentation Characterization of PECVD Silicon Nitride on
Silicon Subjected to Mechanical Fatigue Loading ............... 173
Z.-K. Huang, K.-S. Ou, and K.-S. Chen
Effect of Phosphorus Doping on the Young's Modulus and
Stress of Polysilicon Thin Films .............................. 179
Elena Bassiachvili and Patricia Nieva
Residual Stress in Sputtered Silicon Oxycarbide Thin Films .... 185
Ping Du, I-Kuan Lin, Yunfei Yan, and Xin Zhang
Solid Bridging during Pattern Collapse (Stiction) Studied
on Silicon Nanoparticles ...................................... 191
Daniel Peter, Michael Dalmer, Andriy Lotnyk, Lorenz
Kienle, Alfred Lechner, and Wolfgang Bensch
Fabrication and Characterization of Two Compliant Electrical
Contacts for MEMS: Gallium Microdroplets and Carbon Nanotube
Turfs ......................................................... 197
Y. Kim, A. Qiu, J.A. Reid, R.D. Johnson, and D.F. Bahr
Author Index .................................................. 205
Subject Index ................................................. 207
|
