Foreword .................................................... xxxix
Preface ....................................................... xli
1 Introduction to Theoretical and Applied Plasma Chemistry ..... I
1.1 Plasma as the Fourth State of Matter .................... I
1.2 Plasma in Nature and in the Laboratory .................. 2
1.3 Plasma Temperatures: Thermal and Non-Thermal Plasmas .... 4
1.4 Plasma Sources for Plasma Chemistry: Gas Discharges ..... 5
1.5 Fundamentals of Plasma Chemistry: Major Components of
Chemically Active Plasma and Mechanisms of Plasma-
Chemical Processes ...................................... 8
1.6 Applied Plasma Chemistry ................................ 9
1.7 Plasma as a High-Tech Magic Wand of Modern Technology .. 10
2 Elementary Plasma-Chemical Reactions ........................ 12
2.1 Ionization Processes ................................... 12
2.2 Elementary Plasma-Chemical Reactions of Positive Ions .. 22
2.3 Elementary Plasma-Chemical Reactions Involving
Negative Ions .......................................... 31
2.4 Electron Emission and Heterogeneous Ionization
Processes .............................................. 42
2.5 Excitation and Dissociation of Neutral Particles
in Ionized Gases ....................................... 54
2.6 Elementary Relaxation Processes of Energy Transfer
Involving Vibrational, Rotationally, and
Electronically Excited Molecules ....................... 67
2.7 Elementary Chemical Reactions of Excited Molecules:
Fridman-Macheret α-Model ............................... 79
3 Plasma-Chemical Kinetics, Thermodynamics, and
Electrodynamics ............................................. 92
3.1 Plasma Statistics and Thermodynamics, Chemical and
Ionization Equilibrium, and the Saha Equation .......... 92
3.2 Electron Energy Distribution Functions (EEDFs) in
Non-Thermal Plasma .................................... 100
3.3 Diffusion, Electric/Thermal Conductivity, and
Radiation in Plasma ................................... 106
3.4 Kinetics of Vibrational and Electronically Excited
Molecules in Plasma: Effect of Hot Atoms .............. 114
3.5 Vibrational Kinetics of Gas Mixtures, Chemical
Reactions, and Relaxation Processes ................... 124
3.6 Energy Balance and Energy Efficiency of Plasma-
Chemical Processes .................................... 132
3.7. Elements of Plasma Electrodynamics .................... 140
4 Electric Discharges in Plasma Chemistry .................... 157
4.1 Fundamentals of Electric Breakdown, Streamer
Processes, and Steady-State Regimes of Non-
Equilibrium Electrical Discharges ..................... 157
4.2 Glow Discharges ....................................... 175
4.3 Arc Discharges ........................................ 187
4.4 Radiofrequency and Microwave Discharges in Plasma
Chemistry ............................................. 209
4.5 Non-Thermal Atmospheric Pressure Discharges ........... 233
4.6 Microdischarges ....................................... 247
5 Inorganic Gas-Phase Plasma Decomposition Processes ......... 259
5.1 CO2: Dissociation in Plasma, Thermal, and Non-
Thermal Mechanisms .................................... 259
5.2 Physical Kinetics of CO2 Dissociation, Stimulated by
Vibrational Excitation of the Molecules in Non-
Equilibrium Plasma .................................... 268
5.3 Vibrational Kinetics and Energy Balance of Plasma-
Chemical CO2 Dissociation ............................. 276
5.4 Energy Efficiency of CO2 Dissociation in Quasi-
Equilibrium Plasma, and Non-Equilibrium Effects of
Quenching Products of Thermal Dissociation ............ 288
5.5 Experimental Investigations of CO2 Dissociation in
Different Discharge Systems ........................... 293
5.6 CO2 Dissociation in Special Experimental Systems,
Including Supersonic Stimulation and Plasma
Radiolysis ............................................ 304
5.7 Complete CO2 Dissociation in Plasma with Production
of Carbon and Oxygen .................................. 314
5.8 Dissociation of Water Vapor and Hydrogen Production
in Plasma-Chemical Systems ............................ 318
5.9 Experimental Investigations of H2O Dissociation in
Different Discharge Systems ........................... 331
5.10 Inorganic Gas-Phase Plasma-Chemical Processes of
Decomposition of Triatomic Molecules: NH3, SO2, and
N20 ................................................... 336
5.11 Non-Thermal and Thermal Plasma Dissociation of
Diatomic Molecules .................................... 341
6 Gas-Phase Inorganic Synthesis in Plasma .................... 355
6.1 Plasma-Chemical Synthesis of Nitrogen Oxides from Air
and Nitrogen-Oxygen Mixtures: Thermal and Non-Thermal
Mechanisms ............................................. 355
6.2 Elementary Reaction of NO Synthesis Stimulated by
Vibrational Excitation of Molecular Nitrogen ........... 361
6.3 Kinetics and Energy Balance of Plasma-Chemical NO
Synthesis Stimulated in Air and O2-N2 Mixtures by
Vibrational Excitation ................................. 367
6.4 Experimental Investigations of NO Synthesis from Air
and N2-O2 Mixtures in Different Discharges ............. 374
6.5 Plasma-Chemical Ozone Generation: Mechanisms and
Kinetics ............................................... 382
6.6 Experimental and Industrial Plasma-Chemical Ozone
Generators ............................................. 392
6.7 Synthesis of KrF2 and Other Aggressive Fluorine
Oxidizers .............................................. 399
6.8 Plasma-Chemical Synthesis of Hydrazine (N2H4),
Ammonia (NH3), Nitrides of Phosphorus, and Some Other
Inorganic Compounds .................................... 406
7 Plasma Synthesis, Treatment, and Processing of Inorganic
Materials, and Plasma Metallurgy ........................... 417
7.1 Plasma Reduction of Oxides of Metals and Other
Elements .............................................. 417
7.2 Production of Metals and Other Elements by
Carbothermic Reduction and Direct Decomposition of
Their Oxides in Thermal Plasma ........................ 429
7.3 Hydrogen Plasma Reduction of Metals and Other
Elements from Their Halides ........................... 440
7.4 Direct Decomposition of Halides in Thermal and Non-
Thermal Plasma ........................................ 448
7.5 Plasma-Chemical Synthesis of Nitrides and Carbides
of Inorganic Materials ................................ 472
7.6 Plasma-Chemical Production of Inorganic Oxides by
Thermal Decomposition of Minerals, Aqueous
Solutions, and Conversion Processes ................... 477
7.7 Plasma-Chemical Production of Hydrides, Borides,
Carbonyls, and Other Compounds of Inorganic
Materials ............................................. 488
7.8 Plasma Cutting, Welding, Melting, and Other High-
Temperature Inorganic Material Processing
Technologies .......................................... 493
8 Plasma-Surface Processing of Inorganic Materials: Micro-
and Nano-Technologies ...................................... 499
8.1 Thermal Plasma Spraying ............................... 499
8.2 Plasma-Chemical Etching: Mechanisms and Kinetics ...... 510
8.3 Specific Plasma-Chemical Etching Processes ............ 523
8.4 Plasma Cleaning of CVD and Etching Reactors in
Micro-Electronics and Other Plasma Cleaning
Processes ............................................. 531
8.5 Plasma Deposition Processes: Plasma-Enhanced Chemical
Vapor Deposition and Sputtering Deposition ............ 541
8.6 Ion Implantation Processes: Ion-Beam Implantation and
Plasma-Immersion Ion Implantation ..................... 551
8.7 Microarc (Electrolytic-Spark) Oxidation Coating and
Other Microdischarge Surface Processing Systems ....... 557
8.8 Plasma Nanotechnologies: Nanoparticles and Dusty
Plasmas ............................................... 566
8.9 Plasma Nanotechnologies: Synthesis of Fullerenes and
Carbon Nanotubes ...................................... 581
9 Organic and Polymer Plasma Chemistry ....................... 589
9.1 Thermal Plasma Pyrolysis of Methane and Other
Hydrocarbons: Production of Acetylene and Ethylene .... 589
9.2 Conversion of Methane into Acetylene and Other
Processes of Gas-Phase Conversion of Hydrocarbons in
Non-Thermal Plasmas ................................... 598
9.3 Plasma Synthesis and Conversion of Organic Nitrogen
Compounds ............................................. 604
9.4 Organic Plasma Chemistry of Chlorine and Fluorine
Compounds ............................................. 611
9.5 Plasma Synthesis of Aldehydes, Alcohols, Organic
Acids, and Other Oxygen-Containing Organic Compounds .. 617
9.6 Plasma-Chemical Polymerization of Hydrocarbons:
Formation of Thin Polymer Films ....................... 622
9.7 Interaction of Non-Thermal Plasma with Polymer
Surfaces: Fundamentals of Plasma Modification of
Polymers .............................................. 632
9.8 Applications of Plasma Modification of Polymer
Surfaces .............................................. 641
9.9 Plasma Modification of Gas-Separating Polymer
Membranes ............................................. 655
10 Plasma-Chemical Fuel Conversion and Hydrogen Production .... 676
10.1 Plasma-Chemical Conversion of Methane, Ethane,
Propane, and Natural Gas into Syngas (CO-H2) and
Other Hydrogen-Rich Mixtures .......................... 676
10.2 Plasma-Chemical Reforming of Liquid Fuels into
Syngas (CO-H2): On-Board Generation of Hydrogen-Rich
Gases for Internal Combustion Engine Vehicles ......... 692
10.3 Combined Plasma-Catalytic Production of Hydrogen by
Partial Oxidation of Hydrocarbon Fuels ................ 701
10.4 Plasma-Chemical Conversion of Coal: Mechanisms,
Kinetics, and Thermodynamics .......................... 707
10.5 Thermal and Non-Thermal Plasma-Chemical Systems for
Coal Conversion ....................................... 716
10.6 Energy and Hydrogen Production from Hydrocarbons
with Carbon Bonding in Solid Suboxides and without
CO2 Emission .......................................... 732
10.7 Hydrogen Sulfide Decomposition in Plasma with
Production of Hydrogen and Sulfur: Technological
Aspects of Plasma-Chemical Hydrogen Production ........ 738
11 Plasma Chemistry in Energy Systems and Environmental
Control .................................................... 755
11.1 Plasma Ignition and Stabilization of Flames ........... 755
11.2 Mechanisms and Kinetics of Plasma-Stimulated
Combustion ............................................ 770
11.3 Ion and Plasma Thrusters .............................. 787
11.4 Plasma Applications in High-Speed Aerodynamics ........ 792
11.5 Magneto-Hydrodynamic Generators and Other Plasma
Systems of Power Electronics .......................... 799
11.6 Plasma Chemistry in Lasers and Light Sources .......... 804
11.7 Non-Thermal Plasma in Environmental Control:
Cleaning Exhaust Gas of SO2 and NOx ................... 817
11.8 Non-Thermal Plasma Treatment of Volatile Organic
Compound Emissions, and Some Other Plasma-
Ecological Technologies ............................... 830
12 Plasma Biology and Plasma Medicine ......................... 848
12.1 Non-Thermal Plasma Sterilization of Different
Surfaces: Mechanisms of Plasma Sterilization .......... 848
12.2 Effects of Atmospheric-Pressure Air Plasma on
Bacteria and Cells: Direct Versus Indirect Treatment,
Surface Versus In-Depth Treatment, and Apoptosis
Versus Necrosis ....................................... 859
12.3 Non-Thermal Plasma Sterilization of Air Streams:
Kinetics of Plasma Inactivation of Biological Micro-
Organisms ............................................. 866
12.4 Plasma Cleaning and Sterilization of Water: Special
Discharges in Liquid Water Applied for Its Cleaning
and Sterilization ..................................... 874
12.5 Plasma-Assisted Tissue Engineering .................... 882
12.6 Animal and Human Living Tissue Sterilization .......... 888
12.8 Plasma-Assisted Wound Healing and Tissue
Regeneration .......................................... 896
12.9 Non-Thermal Plasma Treatment of Skin Diseases ......... 906
References .................................................... 915
Index ......................................................... 963
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