1 Introduction ................................................. 1
1.1 Pores in Silicon and Optics ............................. 1
1.2 Organization of this Book ............................... 3
1.3 References ..............................................
2 Pore Etching Essentials ...................................... 7
2.1 Scope of this Chapter ................................... 7
2.2 Some Basics and Definitions ............................. 8
2.2.1 The Essentials ................................... 8
2.2.2 Basic Current-Voltage Characteristics ........... 10
2.3 Dissolution Mechanisms and Pore Formation .............. 13
2.3.1 Basics .......................................... 13
2.3.2 Direct Dissolution .............................. 16
2.3.3 Dissolution by Anodic Oxidation ................. 18
2.3.4 Pore Formation .................................. 19
2.4 A First Approach to Pores in Semiconductors ............ 20
2.4.1 Basics .......................................... 20
2.4.2 Parameter Space for Pore Etching Experiments .... 21
2.5 The Etching of Deep Macropores in Lightly Doped
n-Type Si Under Backside Illumination .................. 26
2.6 In-Situ Monitoring of Pore Growth ...................... 29
2.6.1 Motivation and Experimental Approach ............ 29
2.6.2 Examples for Multi-Mode In-Situ FFT Impedance
Measurements .................................... 35
2.7 Beyond the SCR Model ................................... 38
2.7.1 The Limits of the SCR Model ..................... 38
2.7.2 Enlarging the Parameter Space for Etching
Macropores ...................................... 43
2.7.3 The Current Burst Model ......................... 48
2.8 Micropores, Mesopores and Special Macropores ........... 52
2.8.1 Micropores and p-Macro(aqu) Pores ............... 52
2.8.2 Mesopores ....................................... 54
2.9 Macropores in Lightly Doped p-Type Silicon ............. 54
2.9.1 The Basics ...................................... 54
2.9.2 Some Specifics .................................. 55
2.10 Summary and Conclusion ................................. 59
2.11 References ............................................. 59
3 Subwavelength Approach of Light Propagation Through Porous
Semiconductors .............................................. 63
3.1 Introduction ........................................... 63
3.2 Isotropic Effective Medium Models ...................... 63
3.3 Anisotropic Effective Medium Models .................... 65
3.3.1 Effective Permittivity Tensor Calculations ...... 66
3.3.2 Effective Permittivity of Mesoporous Silicon
Etched on (110)-Oriented Wafers ................. 70
3.3.3 (100)-Oriented III-V Compound Semiconductors
Containing Crystallographic Pores ............... 74
3.3.4 Surface Plasmon Enhancement of an Optical
Anisotropy in Porous Silicon/Metal Composites ... 78
3.4 Conclusions ............................................ 86
3.5 References ............................................. 87
4 Leaky Waveguide Approach of Light Propagation Through
Porous Semiconductors ....................................... 91
4.1 Introduction ........................................... 91
4.2 Leaky Waveguides ....................................... 91
4.3 Leaky Waveguide Transmission Through MPSi Array ........ 93
4.4 Conclusions ............................................ 99
4.5 References ............................................. 99
5 Normal Waveguide Approach of Light Propagation Through
Porous Semiconductors ...................................... 101
5.1 Introduction .......................................... 101
5.2 Dielectric Waveguides ................................. 101
5.3 Waveguide Transmission Through MPSi Array ............. 104
5.4 Conclusions ........................................... 115
5.5 References ............................................ 116
6 Optical Components from Mesoporous Silicon ................. 117
6.1 Introduction .......................................... 117
6.2 Interference Optical Filters .......................... 118
6.2.1 Antireflection Coatings ........................ 118
6.2.2 Multilayer Dielectric Reflectors ............... 121
6.2.3 Bandpass Filters ............................... 124
6.3 Environmental Instability Problem ..................... 131
6.4 Substrate Absorption Problem .......................... 135
6.5 Conclusions ........................................... 137
6.6 References ............................................ 137
7 Long Wave Pass Filters ..................................... 141
7.1 Introduction .......................................... 141
7.2 Common Types of Long Wave Pass Filters ................ 141
7.3 Long Wave Pass Filters Made of Macroporous Silicon .... 143
7.4 Conclusions ........................................... 149
7.5 References ............................................ 149
8 Macroporous Silicon Ultraviolet Filters .................... 151
8.1 Introduction .......................................... 151
8.2 Theoretical Considerations ............................ 152
8.2.1 Single-Layer Coatings on MPSi Pore Walls ....... 153
8.2.2 Multilayer Coatings on MPSi Pore Walls ......... 155
8.2.3 Wide Field-of-View Design of MPSi UV Filters ... 163
8.3 Fabrication and Results ............................... 165
8.4 Optical Testing ....................................... 169
8.5 Conclusions ........................................... 170
8.6 References ............................................ 172
9 Polarization Components for the UV Range ................... 173
9.1 Introduction .......................................... 173
9.2 Theoretical Considerations ............................ 174
9.3 Experimental Results .................................. 176
9.4 Conclusions ........................................... 178
9.5 References ............................................ 180
10 Retroreflection Suppression Plate .......................... 181
10.1 Introduction .......................................... 181
10.2 Prinicple of Operation ................................ 182
10.3 Experimental Demonstration ............................ 185
10.4 Conclusions ........................................... 186
10.5 References ............................................ 187
11 Omnidirectional IR Filters ................................. 189
11.1 Introduction .......................................... 189
11.2 Theoretical Considerations ............................ 189
11.3 Fabrication ........................................... 193
11.4 Conclusions ........................................... 196
11.5 References ............................................ 196
12 Biochemical Sensors Based on Porous Silicon ................ 197
12.1 Introduction .......................................... 197
12.2 Functionalization of Porous Silicon ................... 197
12.3 Porous Silicon Sensors Based on Luminescence
Quenching ............................................. 198
12.4 Porous Silicon Sensors Based on Change of Refractive
Index ................................................. 199
12.5 Conclusions ........................................... 201
12.6 References ............................................ 202
Index ......................................................... 207
|
