Goodwin E.P. Field guide to interferometric optical testing / E.P.Goodwin, J.C.Wyant. - Bellingham: SPIE, 2006. - xii, 100 p.: ill. - (SPIE field guides; FG10.). - Bibliogr.: p.93-96. - Ind.: p.97-100. - ISBN 081946510-0  Место хранения:   084 | Конструкторско-технологический институт научного приборостроения CO РАН | Новосибирск

Оглавление / Contents

Glossary ........................................................ x Fundamentals of Interferometry .................................. 1 Two-Beam Interference Equation ............................... 1 Basic Concepts and Definitions ............................... 2 Conditions for Obtaining Fringes ............................. 3 Visibility ................................................... 4 Spatial Coherence ............................................ 5 Polarization ................................................. 6 Beamsplitters ................................................ 7 Plate and Pellicle Beamsplitters ............................. 8 Interferometers ................................................. 9 The Interferometer ........................................... 9 Classic Fizeau Interferograms ............................... 10 Newton's Rings .............................................. 11 Twyman-Green Interferometer ................................. 12 Compensating Plate .......................................... 13 PBS-based Twyman-Green Interferometer ....................... 14 Laser-based Fizeau .......................................... 15 Mach-Zehnder Interferometer ................................. 17 Beam Testing ................................................ 18 Lateral Shear Interferometry ................................ 19 Rotating Grating LSI ........................................ 20 Radial Shear Interferometer ................................. 21 Interferograms ................................................. 22 Interferograms .............................................. 22 Wavefront Aberration Coefficients ........................... 23 Zernike Polynomials ......................................... 24 RMS Wavefront Error ......................................... 26 Spherical Aberration Interferograms ......................... 27 Astigmatism Interferograms .................................. 28 Interferograms—Other Aberrations ............................ 29 Moire ....................................................... 30 Moire and Interferograms .................................... 31 Phase-Shifting Interferometry .................................. 32 Direct Phase Measurement .................................... 32 Methods for Phase Shifting .................................. 33 Continuous Phase Shifting ................................... 34 Liquid Crystal Retarder ..................................... 35 Phase Shifting Algorithms ................................... 36 Basic Phase Unwrapping ...................................... 37 Phase-Stepping vs. Phase-Ramping ............................ 38 Errors in PSI ............................................... 39 Quantization Errors ......................................... 40 Incorrect Phase Shift ....................................... 41 Avoiding Vibrations ......................................... 42 Spatial Synchronous and Fourier Methods ..................... 43 Spatial Carrier Interferometry .............................. 44 Ground Glass ................................................ 45 Surface Microstructure ......................................... 46 Surface Microstructure ...................................... 46 Nomarski Interference Microscope ............................ 47 Fringes of Equal Chromatic Order (FECO) ..................... 48 Phase-Shifting Interference Microscope ...................... 49 Multiple-Wavelength Interferometer .......................... 50 Vertical Scanning Techniques ................................ 51 Flat Surface Testing ........................................... 52 Flat Surface Testing ........................................ 52 Mirrors—Continued ........................................... 53 Windows—Continued ........................................... 54 Prisms ...................................................... 55 Corner Cubes ................................................ 56 Curved Surface Testing ......................................... 57 Testing Curved Surfaces—Test Plate .......................... 57 Curved Surfaces—Twyman-Green ................................ 58 Curved Surfaces—Laser-based Fizeau .......................... 59 Testing Lenses or Lens Systems .............................. 60 Shack Cube Interferometer ................................... 61 Scatterplate Interferometer ................................. 62 Phase-Shifting Scatterplate Interferometer .................. 63 Long-Wavelength Interferometry .............................. 64 Smartt Point Diffraction Interferometer ..................... 65 Phase Shifting a PDI ........................................ 66 Sommargren Diffraction Interferometer ....................... 67 Curved Surfaces, VSWLI ...................................... 68 Absolute Measurements .......................................... 69 Absolute Measurements: Flats ................................ 69 Absolute Measurements: Spheres .............................. 70 Asphere Testing ................................................ 71 Aspheric Surfaces ........................................... 71 Aspheric Testing ............................................ 72 Hyperboloid Null Tests ...................................... 73 Offner Null ................................................. 74 Holographic Null Optics ..................................... 75 CGH Basics .................................................. 76 CGH Design Guidelines ....................................... 77 Non-Null Tests .............................................. 78 Reverse Raytracing .......................................... 79 Sub-Nyquist Interferometry .................................. 80 Long-Wavelength Interferometry .............................. 81 Appendices ..................................................... 82 Non-Interferometric Testing ................................. 82 Foucault (Knife-Edge) Test .................................. 83 Ronchi Test ................................................. 85 Equation Summary ............................................... 86 Bibliography ................................................... 93 Index .......................................................... 97