1 Angle Sensor for Measurement of Surface Slope and Tilt
Motion ....................................................... 1
1.1 Introduction ............................................ 1
1.2 Angle Sensor with Quadrant Photodiode ................... 2
1.3 Angle Sensor with Photodiode Array ..................... 15
1.4 Angle Sensor with Single-cell Photodiode ............... 28
1.5 Summary ................................................ 31
1.6 References ............................................. 33
2 Laser Autocollimator for Measurement of Multi-axis Tilt
Motion ...................................................... 35
2.1 Introduction ........................................... 35
2.2 Two-axis Laser Autocollimator .......................... 36
2.3 One-lens Laser Micro-autocollimator .................... 53
2.4 Three-axis Laser Autocollimator ........................ 56
2.5 Summary ................................................ 67
2.6 References ............................................. 67
3 Surface Encoder for Measurement of In-plane Motion .......... 69
3.1 Introduction ........................................... 69
3.2 Surface Encoder for MDOF In-plane Motion ............... 70
3.2.1 Multi-probe-type MDOF Surface Encoder ........... 70
3.2.2 Scanning Laser Beam-type MDOF Surface Encoder ... 83
3.3 Fabrication of Two-axis Sinusoidal Grid for Surface
Encoder ................................................ 90
3.3.1 Fabrication System .............................. 90
3.3.2 Analysis and Compensation of Fabrication
Error ........................................... 91
3.4 Application of Surface Encoder in Surface Motor-
driven Planar Stage .................................... 99
3.4.1 Stage System .................................... 99
3.4.2 Stage Performance .............................. 104
3.5 Summary ............................................... 107
3.6 References ............................................ 107
4 Grating Encoder for Measurement of In-plane and
Out-of-plane Motion ........................................ 109
4.1 Introduction .......................................... 109
4.2 Two-degree-of-freedom Linear Grating Encoder .......... 110
4.3 Three-axis Grating Encoder with Sinusoidal Grid ....... 129
4.4 Three-axis Grating Encoder with Rectangular XY-grid ... 136
4.5 Summary ............................................... 140
4.6 References ............................................ 140
5 Scanning Multi-probe System for Measurement of Roundness ... 143
5.1 Introduction .......................................... 143
5.2 Three-slope Sensor Method ............................. 144
5.3 Mixed Method .......................................... 157
5.4 Summary ............................................... 169
5.5 References ............................................ 173
6 Scanning Error Separation System for Measurement of
Straightness ............................................... 175
6.1 Introduction .......................................... 175
6.2 Three-displacement Sensor Method with Self Zero-
adjustment ............................................ 175
6.2.1 Three-displacement Sensor Method and Zero-
adjustment Error ............................... 175
6.2.2 Three-displacement Sensor Method with Self
Zero-adjustment ................................ 180
6.3 Error Separation Method for Machine Tool Slide ........ 195
6.3.1 Slide Straightness Error of Precision Machine
Tool ........................................... 195
6.3.2 Error Separation Method for Slide
Straightness Measurement ....................... 195
6.4 Summary ............................................... 208
6.5 References ............................................ 210
7 Scanning Micro-stylus System for Measurement of Micro-
aspherics .................................................. 211
7.1 Introduction .......................................... 211
7.2 Compensation of Scanning Error Motion ................. 212
7.3 Micro-stylus Probe .................................... 225
7.3.1 Micro-ball Glass Tube Stylus ................... 225
7.3.2 Tapping-type Micro-stylus ...................... 233
7.4 Small-size Measuring Instrument for Micro-aspherics ... 237
7.5 Summary ............................................... 242
7.6 References ............................................ 242
8 Large Area Scanning Probe Microscope for Micro-textured
Surfaces ................................................... 245
8.1 Introduction .......................................... 245
8.2 Capacitive Sensor-compensated Scanning Probe
Microscope ............................................ 246
8.3 Linear Encoder-compensated Scanning Probe
Microscope ............................................ 258
8.4 Spiral Scanning Probe Microscope ...................... 266
8.5 Summary ............................................... 279
8.6 References ............................................ 281
9 Automatic Alignment Scanning Probe Microscope System
for Measurement of 3D Nanostructures ....................... 283
9.1 Introduction .......................................... 283
9.2 Optical Probe for Automatic Alignment ................. 285
9.2.1 Alignment Principle ............................ 285
9.2.2 Alignment Procedure ............................ 288
9.3 Instrumentation of the Automatic Alignment AFM ........ 299
9.3.1 Instrument Design .............................. 299
9.3.2 Instrument Performance ......................... 305
9.4 Summary ............................................... 317
9.5 References ............................................ 318
10 Scanning Image-sensor System for Measurement of Micro-
dimensions ................................................. 321
10.1 Introduction .......................................... 321
10.2 Micro-width Measurement by Scanning Area-image
Sensor ................................................ 322
10.2.1 Micro-width of Long Tool Slit .................. 322
10.2.2 Evaluation of Slit Width ....................... 323
10.2.3 Scanning Area-image Sensor ..................... 327
10.2.4 Slit Width Measurement in Production Line ...... 331
10.3 Micro-radius Measurement by Scanning Line-image
Sensor ................................................ 335
10.3.1 Micro-radius of Long Tool Edge ................. 335
10.3.2 Evaluation of Edge Radius ...................... 336
10.3.3 Edge Radius Measurement in Production Line ..... 341
10.4 Summary ............................................... 350
10.5 References ............................................ 351
Index ......................................................... 353
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