Handbook of optical metrology: principles and applications / ed. by T.Yoshizawa. - Boca Raton; London: CRC, 2009. - xiii, 730 p.: ill. - Incl. bibl. ref. - Ind. - p.715-730. - ISBN 978-0-8493-3760-4  Место хранения:   084 | Конструкторско-технологический институт научного приборостроения CO РАН | Новосибирск

Оглавление / Contents

Preface ........................................................ ix Contributors ................................................... xi PART I Fundamentals of Optical Elements and Devices Chapter 1 Light Sources ........................................ 3 Natalia Dushkina Chapter 2 Lenses, Prisms, and Mirrors ......................... 85 Peter R. Hall Chapter 3 Optoelectronic Sensors ............................. 105 Motohiro Suyama Chapter 4 Optical Devices and Optomechanical Elements ........ 135 Akihiko Chaki and Kenji Magara PART II Fundamentals of Principles and Techniques for Metrology Chapter 5 Propagation of Light ............................... 157 Natalia Dushkina Chapter 6 Interferometry ..................................... 191 David A. Page Chapter 7 Holography ......................................... 219 Giancarlo Pedrini Chapter 8 Speckle Methods and Applications ................... 241 Nandigana Krishna Mohan Chapter 9 Moire Metrology .................................... 263 Lianhua Jin Chapter 10 Optical Heterodyne Measurement Method .............. 281 Masao Hirano Chapter 11 Diffraction ........................................ 309 Toru Yoshizawa Chapter 12 Light Scattering ................................... 321 Lev T. Perelman Chapter 13 Polarization ....................................... 339 Michael Shribak Chapter 14 Near-Field Optics .................................. 351 Wenhao Huang, Xi Li, and Guoyong Zhang Chapter 15 Length and Size .................................... 365 René Schödel PART III Practical Applications Chapter 16 Displacement ....................................... 393 Akiko Hirai, Mariko Kajima, and Souichi Telada Chapter 17 Straightness and Alignment ......................... 411 Ruedi Thalmann Chapter 18 Flatness ........................................... 423 Toshiyuki Takatsuji and Youichi Bitou Chapter 19 Surface Profilometry ............................... 437 Toru Yoshizawa and Toshitaka Wakayama Chapter 20 Three-Dimensional Shape Measurement ................ 475 Frank Chen, Gordon M. Brown, and Mumin Song Chapter 21 Fringe Analysis .................................... 499 Jun-ichi Kato Chapter 22 Photogrammetry ..................................... 511 Nobuo Косhi Chapter 23 Optical Methods in Solid Mechanics ................. 531 Anand Asundi Chapter 24 Optical Methods in Flow Measurement ................ 551 Sang Joon Lee Chapter 25 Polarimetry ........................................ 573 Baoliang Wang Chapter 26 Birefringence Measurement .......................... 615 Yukitoshi Otani Chapter 27 Ellipsometry ....................................... 641 Hiroyuki Fujiwara Chapter 28 Optical Thin Film and Coatings ..................... 661 Cheng-Chung Lee and Shigetaro Ogura Chapter 29 Film Surface and Thickness Profilometry ............ 677 Katsuichi Kitagawa Chapter 30 On-Machine Measurements ............................ 693 Takashi Nomura and Kazuhide Kamiya Index ......................................................... 715