Preface ........................................................ XI
List of Contributors ........................................... XV
1 Introduction ................................................. 1
Motoichi Ohtsu
1.1 History ................................................. 1
1.2 Fiber Probes and Sensing Systems ........................ 2
1.3 Theory .................................................. 3
1.4 Devices ................................................. 6
1.5 Fabrications ............................................ 9
1.6 Applications to Systems and Evolution to Related
Sciences ............................................... 11
1.7 Toward the Future ...................................... 12
References .................................................. 13
2 Nanofabrication Principles and Practice ..................... 17
Tadashi Kawazoe and Motoichi Ohtsu
2.1 Adiabatic Nanofabrication .............................. 17
2.2 Nonadiabatic Nanofabrication ........................... 19
2.2.1 Nonadiabatic Near-Field Optical Chemical Vapor
Deposition ...................................... 19
2.2.2 Nonadiabatic Near-Field Photolithography ........ 27
References .................................................. 33
3 Nanofabrications by Self-Organization and Other Related
Technologies ................................................ 35
Takashi Yatsui, Wataru Nomura, Kazuya Hirata, Yoshinori
Tabata, and Motoichi Ohtsu
3.1 Introduction ........................................... 35
3.2 Near-Field Optical Chemical Vapor Deposition ........... 35
3.3 Self-Assembling Method Via Optical Near-Field
Interactions ........................................... 41
3.3.1 Regulating the Size and Position of
Nanoparticles Using Size-Dependent Resonance .... 41
3.3.2 Self-Assembly of Nanoparticles Using Near-
Field Desorption ................................ 45
3.3.3 One-Dimensional Alignment of Nanoparticles
Using an Optical Near-field ..................... 49
3.4 Near-Field Imprint Lithography ......................... 55
3.5 Nonadiabatic Optical Near-Field Etching ................ 60
References .................................................. 64
4 Fabrication of Quantum Dots for Nanophotonic Devices ........ 69
Kouichi Akahane and Naokatsu Yamamoto
4.1 Introduction ........................................... 69
4.2 Fabrication of Self-Assembled QDs ...................... 71
4.2.1 Control of Density and Emission Wavelength of
Self-Assembled QDs .............................. 73
4.2.2 Shortening Emission Wavelengths of Self-
Assembled QDs ................................... 73
4.2.3 Controlling the Density of Self-Assembled QDs ... 77
4.2.4 Fabrication of Self-Assembled QDs with
Antimonide-Related Materials .................... 80
4.2.5 Fabrication of Ultrahigh-Density QDs ............ 83
4.2.6 Summary ......................................... 90
4.3 Fabrication Techniques of Site-Controlled
Nanostrucrures ......................................... 91
4.3.1 Nanopositioning Technique for Quantum
Structures with Dioxide Mask .................... 91
4.3.2 Artificially Prepared Nanoholes for Arrayed QD
Structure Fabrication ........................... 95
4.3.3 Nanojet Probe Method for Site-Controlled InAs
QD Structure .................................... 96
4.3.4 Scanning Tunneling Probe Assisted
Nanolithography for Site-Controlled Individual
InAs QD Structure ............................... 98
4.3.5 Metal-Mask MBE Technique for Selective-Area QD
Growth .......................................... 99
4.4 Silicon-Related Quantum Structure Fabrication
Technology ............................................ 100
4.4.1 III-V Compound Semiconductor QD on a Si
Substrate ...................................... 100
4.4.2 Fabrication Technique of Silicon
Nanoparticles as Si-QD Structures .............. 101
References ................................................. 103
5 ZnO Nanorod Heterostructures for Nanophotonic Device
Applications ............................................... 105
Gyu-Chul Yi
5.1 Introduction .......................................... 105
5.2 ZnO Axial Nanorod Quantum Structures .................. 108
5.3 ZnO Radial Nanorod Heterostructures ................... 117
5.4 Conclusions ........................................... 126
References ................................................. 128
6 Lithography by Nanophotonics ............................... 131
Ryo Kuroda, Yasuhisa Inao, Shinji Nakazato, Toshiki Ito,
Takako Yamaguchi, Tomohiro Yamada, Akira Terao, and
Natsuhiko Mizutani
6.1 Introduction .......................................... 131
6.2 Principle of the Optical Near-Field Lithography ....... 132
6.3 Optical Near-Field Lithography System ................. 136
6.4 Fabricated Patterns by Optical Near-Field
Lithography ........................................... 140
6.5 Improvement of Resolution and Fabricated Ultrafine
Patterns .............................................. 142
6.6 Summary ............................................... 144
References ................................................. 146
7 Nanopatterned Media for High-Density Storage ............... 147
Hiroyuki Hieda
7.1 Introduction .......................................... 147
7.2 Nanopatterned Media ................................... 149
7.2.1 Fabrication Process of Nanopatterned Media ..... 150
7.3 Block-Copolymer Lithography for Nanopatterned Media ... 153
7.3.1 Self-Assembled Phase Separation of Block-
Copolymers ..................................... 153
7.3.2 Fabrication of Magnetic Nanodots by Block-
Copolymer Lithography .......................... 155
7.4 Control of Orientation of Self-Assembled Periodic
Patterns of Block-Copolymers .......................... 158
7.5 Summary ............................................... 162
References ................................................. 164
8 Nanophotonics Recording Device for High-Density Storage .... 167
Tetsuya Nishida, Takuya Matsumoto, and Fumiko Akagi
8.1 Introduction .......................................... 167
8.2 Thermally Assisted Magnetic Recording Simulation ...... 168
8.3 The 'Nanobeak', a Near-Field Optical Probe ............ 170
8.4 Bit-Patterned Medium with Magnetic Nanodots ........... 172
8.5 Hybrid Recording Experiment ........................... 174
8.6 Near-Field Optical Efficiency in Hybrid Recording ..... 175
8.7 Summary ............................................... 177
References ................................................. 178
9 X-ray Devices and the Possibility of Applying
Nanophotonics .............................................. 179
Masato Koike, Shinji Miyauchi, Kazuo Sano, and Takashi
Imazono
9.1 Introduction .......................................... 179
9.2 Design of the Multilayer Laminar-Type Grating ......... 180
9.3 Specification of the Multilayer Laminar-Type
Grating ............................................... 183
9.4 Fabrication of Multilayer Laminar-Type Gratings ....... 183
9.5 Simulation of Diffraction Efficiency .................. 185
9.6 Measurement of Diffraction Efficiency ................. 186
9.7 Roughness Evaluation using Debye-Waller Factors ....... 189
References ................................................. 190
10 Nanostructuring of Thin-Film Surfaces in Femtosecond
Laser Ablation ............................................. 193
Kenzo Miyazaki
10.1 Introduction .......................................... 193
10.2 Experimental .......................................... 194
10.3 Properties of Nanostructuring ......................... 194
10.3.1 Polarization ................................... 195
10.3.2 Multiple Pulses ................................ 195
10.3.3 Fluence ........................................ 195
10.3.4 Laser Wavelength ............................... 197
10.3.5 Pulse Width .................................... 197
10.4 Bonding-Structure Change .............................. 197
10.5 Dynamic Processes ..................................... 198
10.5.1 Reflectivity of Ablating Surface ............... 199
10.5.2 Ultrafast Dynamics ............................. 202
10.6 Local Fields .......................................... 204
10.7 Origin of Periodicity ................................. 208
10.8 Summary ............................................... 222
References ................................................. 212
11 Quantum Dot Nanophotonic Waveguides ........................ 215
Lih Y. Lin and Chia-Jean Wang
11.1 Conceptual Formation and Modeling of the Device ....... 216
11.1.1 QD Gain vs. Pump Power ......................... 218
11.1.2 FDTD Modeling for Interdot Coupling ............ 220
11.1.3 Monte Carlo Simulation for Transmission
Efficiency ..................................... 221
11.2 From Concept to Realization - Fabrication of the
Device ................................................ 224
11.2.1 DNA-Directed Self-Assembly Fabrication ......... 224
11.2.1.1 Self-Assembly Process and
Characterization ...................... 224
11.2.1.2 Programmable DNA-Directed Self-
Assembly .............................. 227
11.2.2 Self-Assembly Through APTES .................... 228
11.2.2.1 Self-Assembly Process and
Characterization ...................... 228
11.2.2.2 Multiple-QD-Type Waveguide
Fabrication ........................... 231
11.2.3 Discussion on Fabrication Methods .............. 232
11.3 How Well the Devices Work - A First Probe ............. 233
11.3.1 Waveguiding with Flexibility ................... 234
11.3.2 Loss Characterization .......................... 235
11.4 To Probe Further - Summary and Outlook ................ 236
References ................................................. 238
12 Hierarchy in Optical Near-fields and its Application to
Nanofabrication ............................................ 241
Makoto Naruse, Takashi Yatsui, Hirokazu Hori, Kokoro
Kitamura, and Motoichi Ohtsu
12.1 Introduction .......................................... 241
12.2 Angular Spectrum Representation of Optical Near-
Fields ................................................ 242
12.3 Generation of Smaller-Scale Structures via Optical
Near-Fields: A Theoretical Basis ...................... 244
12.4 Experiment ............................................ 247
12.5 Conclusion ............................................ 249
References .................................................... 250
Index ......................................................... 253
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