LIGA and its applications / ed. by V.Saile et al. - Weinheim: Wiley-VCH Verlag GmbH & Co. KGaA, 2009. - x, 479 p.: ill. - (Advanced micro & nanosystems; Vol.7). - Incl. bibl. ref. - Ind.: p.469-479. - ISBN 978-3-527-31698-4  Место хранения:   016 | Библиотека Института ядерной физики СО РАН | Новосибирск

Оглавление / Contents

List of Contributors .......................................... VII 1 Introduction: LICA and Its Applications ..................... 1 Volker Saile 2 X-ray Masks for LICA Microfabrication ....................... 11 Yohannes Desta and Jost Goettert 3 Innovative Exposure Techniques for 3D Microfabrication ...... 51 Naoki Matsuzuka and Osamu Tabata 4 Hot Embossing of LICA Microstructures ....................... 69 Mathias Heckele and Matthias Worgull 5 Exposure and Development Simulation for Deep X-ray LICA .... 103 Jan G. Korvink, Sadik Hafizovic, Yoshikazu Hirai, and Pascal Meyer 6 Design for LICA and Safe Manufacturing ..................... 143 Ulrich Gengenbach, Ingo Sieber, and Ulrike Wallrabe 7 Commercialization of LICA .................................. 189 Ron A. Lawes 8 Polymer Optics and Optical MEMS ............................ 205 Jürgen Mohr 9 Refractive X-ray Lenses Produced by X-ray Lithography ...... 233 Arndt Last 10 RF Applications ............................................ 243 Sven Achenbach and David M. Klymyshyn 11 Evolution of the Microspectrometer ......................... 281 Reiner Wechsung, Sven Schönfelder, and Andreas Decker 12 Actuator Manufacture with LICA Processes ................... 297 Todd Christenson 13 Development of Microfluidic Devices Created via the LICA Process .................................................... 323 Masaya Kurokawa 14 Application of Inspection Devices .......................... 337 Yoshihiro Hirata 15 The Micro Harmonic Drive Gear .............................. 351 Reinhard Degen and Rolf Slatter 16 Microinjection Molding Machines ............................ 395 Christian Cornik 17 Filled Resist Systems ...................................... 415 Thomas Hanemann, Claas Müller, and Michael Schulz 18 Dramatic Downsizing of Soft X-ray Synchrotron Light Source from Compact to Tabletop ............................ 443 Hironari Yamada, Norio Toyosugi, Dorian Minkov, and Yoshiko Okazaki 19 PTFE Photo-fabrication by Synchrotron Radiation ............ 453 Takanori Katoh and Yanping Zhang Index ......................................................... 469