Materials Advances for Next-Generation Microelectronics
Molecular Electronics
James R. Heath ............................................... 1
Phase Change Materials
Simone Raoux ................................................ 25
Porous pSiCOH Ultralow-k Dielectrics for Chip Interconnects
Prepared by PECVD
Alfred Grill ................................................ 49
Thin-Film Organic Electronic Devices
Howard E. Katz and Jia Huang ................................ 71
Immersion Lithography: Photomask and Wafer-Level Materials
Roger H. French and Hoang V. Tran ........................... 93
Materials for Optical Lithography Tool Application
Harry Sewell and Jan Mulkens ............................... 127
Nanoimprint Lithography Materials Development for
Semiconductor Device Fabrication
Elizabeth A. Costner, Michael W. Lin, Wei-Lun Jen, and
C. Grant Willson ........................................... 155
High-k/Metal Gate Science and Technology
Supratik Guha and Vijay Narayanan .......................... 181
Strain: A Solution for Higher Carrier Mobility in Nanoscale
MOSFETs
Min Chu, Yongke Sun, Umamaheswari Aghoram, and Scott
E. Thompson ................................................ 203
Size-Dependent Resistivity in Nanoscale Interconnects
Daniel Josell, Sywert H. Brongersma, and Zsolt Tőkei ....... 231
Carbon Nanotube Interconnects
Azad Naeemi and James D. Meindl ............................ 255
Materials for Magnetoresistive Random Access Memory
J.M. Slaughter .............................................. 277
Current Interest
Chameleon Coatings: Adaptive Surfaces to Reduce Friction
and Wear min Extreme Environments
C. Muratore and A.A. Voevodin .............................. 297
Doped Oxides for High-Temperature Luminescence and Lifetime
Thermometry
M.D. Chambers and D.R. Clarke .............................. 325
Plasticity of Micrometer-Scale Single Crystals in
Compression
Michael D. Uchic, Paul A. Shade, and Dennis M. Dimiduk ..... 361
Recent Progress in the Study of Inorganic Nanotubes and
Fullerene-Like Structures
R. Tenne and G. Seifert .................................... 387
Recent Progress in Theoretical Prediction, Preparation, and
Characterization of Layered Ternary Transition-Metal
Carbides
Jingyang Wang and Yanchun Zhou ............................. 415
Shape Memory Polymer Research
Patrick T. Mather, Xiaofan Luo, and Ingrid A. Rousseau ..... 445
Solid-Surface Characterization by Wetting
Abraham Marmur ............................................. 473
Index
Cumulative Index of Contributing Authors, Volumes 3 5-39 ...... 491
Errata
An online log of corrections to Annual Review of Materials
Research articles may be found at
http://matsci.annualreviews.org/errata.shtml
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