1. Sensor Design Guidelines ..................................... 1
Anis Zribi
2. Transduction Principles ..................................... 17
Jeffrey Fortin
3. Growth and Synthesis of Nanostructured Thin Films ........... 31
Yiping Zhao
4. Integrated Micromachining Technologies for Transducer
Fabrication ................................................ 65
Wei Cheng Tian
5. Applications of Functional Thin Films and Nanostructures
in Gas Sensing .............................................. 85
Audrey Nelson
6. Chemical Sensors: New Ideas for the Mature Field ........... 103
Radislav A. Potyrailo
7. Applications of Functional Thin Films for Mechanical
Sensing .................................................... 145
Chang Liu
8. Sensing Infrared and Terahertz Regions by Functional
Films ...................................................... 167
Magnus Willander, Victor Ryzhii, and Qingxiang Zhao
Index ......................................................... 211
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