Optical inspection of microsystems (Boca Raton, 2007). - ОГЛАВЛЕНИЕ / CONTENTS
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ОбложкаOptical inspection of microsystems / ed. by Osten W. - Boca Raton: CRC, 2007. - 503 p. - (Optical science and engineering; Vol. 109). - ISBN 0-8493-3682-1
 

Оглавление / Contents
 
Chapter 1
Image Processing and Computer Vision for MEMS Testing ........... 1
Markus Hüttel

Chapter 2
Image Correlation Techniques for Microsystems Inspection ....... 55
Dietmar Vogel and Bernd Michel

Chapter 3
Light Scattering Techniques for the Inspection of
Microcomponents and Microstructures ........................... 103
Angela Duparré

Chapter 4
Characterization and Measurement of Microcomponents with
the Atomic Force Microscope (AFM) ............................. 121
F. Michael Serry and Joanna Schmit

Chapter 5
Optical Profiling Techniques for MEMS Measurement ............. 145
Klaus Körner, Aiko Ruprecht, and Tobias Wiesendanger

Chapter 6
Grid and Moiré Methods for Micromeasurements .................. 163
Anand Asundi, Bing Zhao, and Huimin Xie

Chapter 7
Grating Interferometry for In-Plane Displacement and Strain
Measurement of Microcomponents ................................ 201
Leszek Salbut

Chapter 8
Interference Microscopy Techniques for Microsystem
Characterization .............................................. 217
Alain Bosseboeuf and Sylvain Petitgrand

Chapter 9
Measuring MEMS in Motion by Laser Doppler Vibrometry .......... 245
Christian Rembe, Georg Siegmund, Heinrich Steger, and
Michael Wörtge

Chapter 10
An Interferometric Platform for Static, Quasi-Static, and
Dynamic Evaluation of Out-of-Plane Deformations of MEMS and
MOEMS ......................................................... 293
Christophe Gorecki, Michal Jozwik, and Patrick Delobelle

Chapter 11
Optoelectronic Holography for Testing Electronic Packaging
and MEMS ...................................................... 325
Cosme Furlong

Chapter 12
Digital Holography and Its Application in MEMS/MOEMS
Inspection .................................................... 351
Wolfgang Osten and Pietro Ferraro

Chapter 13
Speckle Metrology for Microsystem Inspection .................. 427
Roland Hofiing and Petra Aswendt

Chapter 14
Spectroscopic Techniques for MEMS Inspection .................. 459
Ingrid De Wolf

Index ......................................................... 483


 
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