Foreword ...................................................... vii
Preface ........................................................ ix
Editors-in-Chief ............................................... xi
Acknowledgments ................................................ xv
Contributors to Volume 3 ..................................... xvii
Contents of All Volumes ....................................... xix
Optical Systems
3.1 Micro-Mirrors .............................................. 1
K. HANE, Department of Nanomechanics, Tohoku University,
Sendai, Japan, and
M. SASAKI, Department of Advanced Science and Technology,
Toyota Technological Institute, Nagoya, Japan
3.2 Diffractive and Defractive Micro-optics ................... 65
STEFAN SINZINGER, Technische Universität Ilmenau,
Ilmenau, Germany
3.3 Photonic Crystals ........................................ 101
SUSUMU NODA, Department of Electronic Science and
Engineering, Kyoto University, Kyoto, Japan
3.4 IR Imaging ............................................... 113
MASAFUMI KIMATA, Department of Micro System Technology,
College of Science and Engineering, Ritsumeikan
University, Shiga, Japan
3.5 Integrated Optics ........................................ 165
TOSHIAKI SUHARA, Department of Electrical, Electronic,
and Information Engineering, Graduate School of
Engineering, Osaka University, Suita, Osaka, Japan
3.6 Artificial Retinas ....................................... 201
WILFRIED MOKWA, Institute of Materials in Electrical
Engineering I, RWTH Aachen University, Aachen, Germany
3.7 Optical Communications ................................... 219
DAN M. MAROM, The Hebrew University of Jerusalem,
Jerusalem, Israel
3.8 Micro-Imaging Systems .................................... 267
CHRISTINE HARENDT and HEINZ-GERD GRAF, Institut für
Mikroelektronik, Stuttgart, Germany
3.9 Biophotonics ............................................. 293
WOLFGANG MÖNCH and HANS ZAPPE, Department of
Microsystems Engineering - IMTEK, University of
Freiburg, Freiburg Germany
Industrial Applications
3.10 RF MEMS .................................................. 323
NICKOLAS KINGSLEY and JOHN PAPAPOLYMEROU, School of
Electrical and Computer Engineering, Georgia Institute
of Technology, Atlanta, GA, USA
3.11 Ink Jets ................................................. 335
JOACHIM HEINZL, Technische Universität Munich, Garching
Germany
3.12 Automotive Applications .................................. 369
NOBUAKI KAWAHARA, Research Laboratories, Denso
Corporation, Aichi, Japan
3.13 Environmental Monitoring ................................. 391
TAKASHI KORENAGA, Tokyo Metropolitan University, Tokyo,
Japan
3.14 Medical Applications ..................................... 421
SARAH AUDET, JIM CARNEY, GREG HAUBRICH, and DAVID A
RUBEN, Medtronic Inc., Minneapolis, MN, USA
ERIK HERRMANN and GLEN VAUGHN, Medtronic Inc., Tempe,
AZ, USA
VINCENT CMH LARIK and ROGIER AM RECEVEUR, Medtronic
Bakken Research Center BV, Maastricht, The Netherlands
ERIK SCOTT, Medtronic Inc., Brooklyn Center, MN, USA
Emerging Topics
3.15 Micro-Combustion ......................................... 475
CHRISTOPHER M. SPADACCINI, Center for Micro- and
Nanotechnology, Lawrence Livermore National Laboratory,
Livermore, CA, USA, and IAN A. WAITZ, Department of
Aeronautics and Astronautics, Massachusetts Institute
of Technology, Cambridge, MA, USA
3.16 Micro-Coolers ............................................ 499
JUNGHOON YEOM and MARK A. SHANNON, Mechanical Science
and Engineering, University of Illinois at Urbana-
Champaign, Urbana, IL, USA
3.17 Resonators, Oscillators, and Frequency References ........ 551
WAN-THAI HSU, Discera Inc., Ann Arbor, MI, USA
3.18 MEMS Atomic Clocks ....................................... 571
SVENJA KNAPPE, National Institute of Standards and
Technolog)) (NIST), Boulder, CO, USA
3.19 Micro-Fuel Cells ......................................... 613
CHRISTOPHER HEBLING, LISBETH ROCHLITZ, and THOMAS
AICHER, Fraunhofer Institute for Solar Energy Systems,
Freiburg Germany
3.20 Molecular Machine-Based NEMS ............................. 635
TONY JUN HUANG, Department of Engineering Science and
Mechanics, The Pennsylvania State University,
University Park, PA, USA
Index ......................................................... 657
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