Preface ....................................................... vii
Contributors ................................................... xi
1 Nanoscale Etching and Deposition ............................. 1
Nathan Marchack and Jane P. Chang
2 Extreme Ultraviolet Light Lithography for Producing
Nanofeatures in Next-Generation Semiconductor Processing .... 35
John Sporre and David N. Ruzic
3 Nonthermal Plasma Synthesis of Semiconductor Nanocrystals ... 55
Uwe Kortshagen and Lorenzo Mangolini
4 Microscale Plasmas for Metal and Metal Oxide Nanoparticle
Synthesis ................................................... 89
Davide Mariotti and R. Mohan Sankaran
5 Large-Scale, Plasma-Assisted Growth of Nanowires ........... 109
Uros Cvelbar and Mahendra K. Sunkara
6 Cathodic Arc Discharge for Synthesis of Carbon
Nanoparticles .............................................. 147
Manish Chhowalla and H. Emrah Unalan
7 Atmospheric Plasmas for Carbon Nanotubes (CNTs) ............ 165
Jae Beom Park, Se Jin Kyung, and Geun Young Yeom
8 Structural Control of Single-Walled Carbon Nanotubes by
Plasma Chemical Vapor Deposition ........................... 219
Rikizo Hatakeyama and Toshiaki Kato
9 Graphene Growth by Plasma-Enhanced Chemical Vapor
Deposition (PECVD) ......................................... 231
M. Meyyappan and Jeong-Soo Lee
10 Modeling Aspects of Plasma-Enhanced Chemical Vapor
Deposition of Carbon-Based Materials ....................... 245
Erik Neyts, Ming Mao, Maxie Eckert, and Annemie Bogaerts
11 Modeling Catalytic Growth of One-Dimensional
Nanostructures ............................................. 291
Eugene Tarn, Kostya (Ken) Ostrikov, and Tony Murphy
12 Diagnostics of Energy Fluxes in Dusty Plasmas .............. 309
Horst R. Maurer and Holger Kersten
13 Selective Functionalization and Modification of Carbon
Nanomaterials by Plasma Techniques ......................... 337
Yuhua Xue and Liming Dai
14 Plasma-Liquid Interactions for Fabrication of
Nanobiomaterials ........................................... 359
Toshiro Kaneko and Rikizo Hatakeyama
15 Assembly and Self-Organization of Nanomaterials ............ 371
Amanda Evelyn Rider and Kostya (Ken) Ostrikov
Index ......................................................... 393
|